LINEAR TCP SOURCE, A CHARGED PARTICLE BEAM SOURCE USING THE LINEAR TCP SOURCE AND A GRID FOR THE CHARGED PARTICLE BEAM SOURCE

원문 (중국어)

Provided is a large linear TCP source, a large linear charged particle beam source using the plasma source, and a grid for the large linear charged particle beam source. The large linear charged particle beam source includes: a large linear TCP source having at least two unit TCP sources mounted inside a plasma vacuum chamber; a beam body positioned at the front of the TCP source and configured to confine plasma generated from the TCP source; a beam grid positioned at an outlet of the beam body to extract charged particles from the plasma inside the beam body; and an acceleration grid positioned at a predetermined distance away from the beam grid to accelerate the charged particles extracted from the beam grid.