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기록
END EFFECTOR
발명심사 중
2조회수
29청구항 · 2 독립항
§ Ⅰ
개요
발명자
Richard BLANK; Roy Scott POWELL
IPC 분류
H1L 21/67B25J 11/B25J 15/B25J 19/2H1L 21/687
CPC 분류
H1L21/67248B25J11/95B25J15/14B25J19/2H1L21/68707
An end effector for supporting a wafer, the end effector having a temperature sensor that is configured to sense a temperature of a wafer supported by the end effector.
원문 (중국어)
An end effector for supporting a wafer, the end effector having a temperature sensor that is configured to sense a temperature of a wafer supported by the end effector.