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기록
HETEROGENEOUS INTEGRATION OF COMPONENTS ONTO COMPACT DEVICES USING MOIRÉ BASED METROLOGY AND VACUUM BASED PICK-AND-PLACE
발명심사 중
1조회수
11청구항 · 1 독립항
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개요
출원인
Board of Regents, The University of Texas System
발명자
Sidlgata V. Sreenivasan; Paras Ajay; Aseem Sayal; Mark McDermott; Shrawan Singhal; Ovadia Abed; Lawrence Dunn; Vipul Goyal; Michael Cullinan
IPC 분류
H1L 21/683B81C 99/G6F 30/392G6F 30/396G6F 30/398G6F 117/10H1L 23/544
CPC 분류
H1L21/6835B81C99/2G6F30/392G6F30/396G6F30/398H1L21/6838H1L23/544G6F2117/10H1L2221/68309H1L2221/68322H1L2221/68354H1L2221/68368H1L2221/68381H1L2223/54426H1L2223/54473
A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise moiré alignment techniques resulting in highly accurate, parallel assembly of feedstocks.
원문 (중국어)
A method for assembling heterogeneous components. The assembly process includes using a vacuum based pickup mechanism in conjunction with sub-nm precise moiré alignment techniques resulting in highly accurate, parallel assembly of feedstocks.