WAFER CARRYING APPARATUS AND SEMICONDUCTOR PROCESS DEVICE

원문 (중국어)

A wafer carrying apparatus includes a base; an edge protection ring assembly; a first detection assembly; and a drive assembly. The base is used to carry a wafer and includes a cavity internally, the edge protection ring assembly includes an edge protection ring, a protection ring support, and a plurality of protection ring connection rods, the edge protection ring is arranged above the base, the protection ring support is arranged below the base at intervals, and the plurality of protection ring connection rods are connected between the protection ring support and the edge protection ring. The drive assembly is arranged in the cavity and connected to the protection ring support, the drive assembly is used to drive the protection ring support to drive the edge protection ring to move between a wafer transfer position and a process position in a vertical direction through the plurality of protection ring connection rods.