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기록
METHODS FOR ELECTRICAL PROPERTY DEPTH PROFILING THROUGH FILMS WITH GRADED COMPOSITION
발명심사 중
14청구항 · 1 독립항
§ Ⅰ
개요
발명자
Bulent M. BASOL; Abhijeet JOSHI
IPC 분류
H1L 21/66G1B 7/6
CPC 분류
H1L22/14G1B7/105
A method of obtaining a depth profile of an electrical property through a film with a composition varying as a function of depth is disclosed.
원문 (중국어)
A method of obtaining a depth profile of an electrical property through a film with a composition varying as a function of depth is disclosed.