REAL-TIME COMPUTER VISION END-POINT DETECTION PIPELINE

원문 (중국어)

A semiconductor etching process end-point detection system includes a sensor configured to measure in real-time electrical properties associated with a semiconductor etching process and to generate raw sensor data, and a computing device configured to receive the raw sensor data. The computing device includes spectrum analyzer circuitry and a memory configured to execute instructions of the spectrum analyzer circuitry via at least one processor. The instructions include obtaining, via the sensor, the raw sensor data; receiving, at the computing device, the raw sensor data; preprocessing the raw sensor data to normalize the raw sensor data to a standard range or distribution; selecting at least one best scoring signal of the normalized sensor data; converting the at least one best scoring signal to a pixel space; and performing an end-point prediction algorithm on the pixel space to predict the end-point of the semiconductor etching process.