TRANSDUCER
개요
발명자
Hiroshi MATSUBARA; Shinsuke Ikeuchi; Ryosuke Niwa; Gou Saitou; Koichi Yoshida
IPC 분류
CPC 분류
A transducer is provided that includes a base having a cavity, and a vibrating layer disposed on an upper side of the base. The vibrating layer includes a fixed portion fixed to the base, and a membrane that is connected to the fixed portion and extends above the cavity. The vibrating layer includes a lower electrode layer connected to the base, a piezoelectric layer disposed on the lower electrode layer, and an upper electrode layer disposed on an upper side of the piezoelectric layer. In at least a portion of the membrane, the upper and lower electrode layers sandwich the piezoelectric layer. The upper electrode layer or the lower electrode layer includes a fixed electrode portion in the fixed portion, a movable electrode portion in a portion of the membrane, and a connection electrode portion that connects the fixed electrode portion to the movable electrode portion.
원문 (중국어)
A transducer is provided that includes a base having a cavity, and a vibrating layer disposed on an upper side of the base. The vibrating layer includes a fixed portion fixed to the base, and a membrane that is connected to the fixed portion and extends above the cavity. The vibrating layer includes a lower electrode layer connected to the base, a piezoelectric layer disposed on the lower electrode layer, and an upper electrode layer disposed on an upper side of the piezoelectric layer. In at least a portion of the membrane, the upper and lower electrode layers sandwich the piezoelectric layer. The upper electrode layer or the lower electrode layer includes a fixed electrode portion in the fixed portion, a movable electrode portion in a portion of the membrane, and a connection electrode portion that connects the fixed electrode portion to the movable electrode portion.