SEMICONDUCTOR DEVICE INCLUDING A TIERED STRUCTURE HAVING TAPERED FILL STRUCTURES
개요
발명자
Collin HOWDER; Justin SHEPHERDSON; Christopher BREYFOGLE
IPC 분류
CPC 분류
Implementations described herein relate to various structures, integrated assemblies, and memory devices. In some implementations, a memory device includes a vertically-oriented contact pillar and a tiered structure proximate to the vertically-oriented contact pillar. The tiered structure includes an access line between two insulative layers and insulative fill structure. The insulative fill structure includes a tapered portion that is between the vertically-oriented contact pillar and the access line. The tapered portion may be between facing surfaces of ends of the insulative layers.
원문 (중국어)
Implementations described herein relate to various structures, integrated assemblies, and memory devices. In some implementations, a memory device includes a vertically-oriented contact pillar and a tiered structure proximate to the vertically-oriented contact pillar. The tiered structure includes an access line between two insulative layers and insulative fill structure. The insulative fill structure includes a tapered portion that is between the vertically-oriented contact pillar and the access line. The tapered portion may be between facing surfaces of ends of the insulative layers.