CAPACITOR, METHOD OF MANUFACTURING THE CAPACITOR, ELECTRONIC DEVICE INCLUDING THE CAPACITOR, AND METHOD OF MANUFACTURING THE ELECTRONIC DEVICE
개요
출원인
SK hynix Inc.; INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY ERICA CAMPUS
발명자
Jeongyeop Lee; Jiwon Moon; Namgue Lee; Ji-Hoon Ahn; Ji-Min Lee
IPC 분류
CPC 분류
Disclosed are capacitors, methods of manufacturing the capacitors, electronic devices including the capacitors, and methods of manufacturing the electronic devices. A capacitor may include a first electrode, a second electrode disposed spaced apart from the first electrode, and a laminated film disposed between the first electrode and the second electrode, wherein the laminated film comprises: a HfZrOlayer, wherein x satisfies 0≤x≤1, y satisfies 1.5<y≤2 and a BiOlayer disposed in one or more of: a region between the first electrode and the HfZrOlayer; a region between the second electrode and the HfZrOlayer; and an intermediate region of the HfZrOlayer in a direction in which the first and second electrodes are spaced apart each other.
원문 (중국어)
Disclosed are capacitors, methods of manufacturing the capacitors, electronic devices including the capacitors, and methods of manufacturing the electronic devices. A capacitor may include a first electrode, a second electrode disposed spaced apart from the first electrode, and a laminated film disposed between the first electrode and the second electrode, wherein the laminated film comprises: a HfZrOlayer, wherein x satisfies 0≤x≤1, y satisfies 1.5<y≤2 and a BiOlayer disposed in one or more of: a region between the first electrode and the HfZrOlayer; a region between the second electrode and the HfZrOlayer; and an intermediate region of the HfZrOlayer in a direction in which the first and second electrodes are spaced apart each other.