METHODS OF MANUFACTURING 3D SEMICONDUCTOR DEVICES AND STRUCTURES WITH ELECTRONIC CIRCUIT UNITS
개요
발명자
Zvi Or-Bach; Jin-Woo Han; Brian Cronquist
IPC 분류
CPC 분류
A method of manufacturing a 3D device including: forming a first level including first transistors and a first interconnect; forming a second level including second transistors; overlaying the second level on the first level; and bonding the second level to the first level; the bonding includes performing metal region to metal region bonding, the 3D device includes at least four electronic circuits (AL4ECs) and at least one redundancy circuit, where the AL4ECs each include a first circuit which includes a portion of the first transistors, where the AL4ECs include a second circuit which includes a portion of the second transistors, where the AL4ECs each include a vertical connectivity structure (VCSt), the VCSt includes pillars, where the pillars are configured to provide electrical connections between the first circuit and the second circuit, and where the AL4ECs each include at least one memory control circuit and at least one memory array.
원문 (중국어)
A method of manufacturing a 3D device including: forming a first level including first transistors and a first interconnect; forming a second level including second transistors; overlaying the second level on the first level; and bonding the second level to the first level; the bonding includes performing metal region to metal region bonding, the 3D device includes at least four electronic circuits (AL4ECs) and at least one redundancy circuit, where the AL4ECs each include a first circuit which includes a portion of the first transistors, where the AL4ECs include a second circuit which includes a portion of the second transistors, where the AL4ECs each include a vertical connectivity structure (VCSt), the VCSt includes pillars, where the pillars are configured to provide electrical connections between the first circuit and the second circuit, and where the AL4ECs each include at least one memory control circuit and at least one memory array.