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기록

TECHNOLOGIES FOR A RIBBON FIELD EFFECT TRANSISTOR WITH TWO-DIMENSIONAL ELECTRON OR HOLE GAS CHANNELS

발명심사 중
2조회수
20청구항 · 3 독립항
§ Ⅰ

개요

발명자

Rachel A. Steinhardt; Pratyush P. Buragohain; Kevin P. O'Brien; Dominique A. Adams; Karam Cho; Scott B. Clendenning; Punyashloka Debashis; Shane Harlson; Raseong Kim; Matthew V. Metz; John J. Plombon; Marko Radosavljevic; Carly Rogan; Hojoon Ryu; Arnab Sen Gupta; Tristan A. Tronic; I-Cheng Tung; Ian Alexander Young

IPC 분류

H1L 29/778H1L 21/8238H1L 27/92H1L 29/6H1L 29/423H1L 29/51H1L 29/66H1L 29/78H1L 29/786

CPC 분류

H10D30/47H10D30/24H10D30/62H10D30/6735H10D30/6757H10D30/701H10D62/118H10D64/689H10D84/193H10D84/38H10D84/853

Technologies for a field effect transistor (FET) with a two-dimensional electron gas (2DEG) or a two-dimensional hole gas (2DHG) are disclosed. In an illustrative embodiment, channel fins of a ribbon FET include two perovskite layers. At an interface between the perovskite layers, a 2DEG or a 2DHG is formed. The 2DEG or 2DHG can act as a channel for an NMOS or PMOS transistor, respectively. In some embodiments, an NMOS transistor with a 2DEG channel can be combined with a PMOS transistor with a 2DHG channel can be combined in a CMOS system. Additionally, methods of manufacturing such transistors are disclosed.

원문 (중국어)

Technologies for a field effect transistor (FET) with a two-dimensional electron gas (2DEG) or a two-dimensional hole gas (2DHG) are disclosed. In an illustrative embodiment, channel fins of a ribbon FET include two perovskite layers. At an interface between the perovskite layers, a 2DEG or a 2DHG is formed. The 2DEG or 2DHG can act as a channel for an NMOS or PMOS transistor, respectively. In some embodiments, an NMOS transistor with a 2DEG channel can be combined with a PMOS transistor with a 2DHG channel can be combined in a CMOS system. Additionally, methods of manufacturing such transistors are disclosed.