THIN FILM TRANSISTORS HAVING ETCHED CONTACT METALLIZATION
개요
발명자
Honore DJIEUTEDJEU; Abhishek Anil SHARMA; Van H. LE; Vinaykumar HADAGALI; Nikhil MEHTA; Yu-Wen HUANG; Umang DESAI; Christopher J. WIEGAND
IPC 분류
CPC 분류
Thin film transistors are described. An integrated circuit structure includes a gate electrode. A gate dielectric layer is on the gate electrode. A channel material layer is on the gate dielectric layer. Source or drain contacts are on the channel material layer. Each of the source or drain contacts has sidewalls which taper outwardly from a top of the source or drain contact to a bottom of the source or drain contact.
원문 (중국어)
Thin film transistors are described. An integrated circuit structure includes a gate electrode. A gate dielectric layer is on the gate electrode. A channel material layer is on the gate dielectric layer. Source or drain contacts are on the channel material layer. Each of the source or drain contacts has sidewalls which taper outwardly from a top of the source or drain contact to a bottom of the source or drain contact.