MESA POROSIFICATION PROCESS
개요
출원인
Commissariat à I'Énergie Atomique et aux Énergies Alternatives
발명자
Carole Pernel; Margaux Audibert; Valentin Vivares
IPC 분류
CPC 분류
A process for porosifying a structure including a base substrate covered with mesas, the mesas being (Al, In, Ga)N or InP mesas or (Al, In, Ga)N/(Al, In, Ga)N or InP/InP mesas, the mesas being electrochemically porosified according to the following cycle of steps: i) applying a first potential for a first duration, ii) applying a second potential for a second duration, whereby porosified mesas are obtainedincluding, from the side faces of the mesas towards the center of the mesas or vice versa, a first portion having a first porosification ratio and a second portion, the second portion having a second porosification ratio higher than the first porosification ratio or the second portion being hollowed out.
원문 (중국어)
A process for porosifying a structure including a base substrate covered with mesas, the mesas being (Al, In, Ga)N or InP mesas or (Al, In, Ga)N/(Al, In, Ga)N or InP/InP mesas, the mesas being electrochemically porosified according to the following cycle of steps: i) applying a first potential for a first duration, ii) applying a second potential for a second duration, whereby porosified mesas are obtainedincluding, from the side faces of the mesas towards the center of the mesas or vice versa, a first portion having a first porosification ratio and a second portion, the second portion having a second porosification ratio higher than the first porosification ratio or the second portion being hollowed out.