Flexible pressure sensor and preparation method thereof, and electronic device
데이터 출처: EPO OPS
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개요
출원 번호
CN202010723154
발명자
LIANG KUI
출원일
Jul 24, 2020
공개일
Oct 4, 2022
특허 패밀리 ID
72949987
IPC 분류
CPC 분류
The invention provides a flexible pressure sensor and a preparation method thereof, and an electronic device. The flexible pressure sensor comprises a first electrode and a second electrode which areoppositely arranged, wherein a first dielectric layer and a second dielectric layer are arranged between the first electrode and the second electrode, the second dielectric layer is located between the first dielectric layer and the second electrode, the elasticity modulus of the first dielectric layer and the elasticity modulus of the second dielectric layer are different, and at least one of thefirst dielectric layer and the second dielectric layer is internally provided with a hollow structure. The flexible pressure sensor has the advantages of high sensitivity and wide range. According tothe flexible pressure sensor, the hollow structure in the dielectric layer can be prepared through a template, and the preparation method is simple.
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