Coating thickness detection method and device, computer readable storage medium and system
데이터 출처: EPO OPS
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개요
출원 번호
CN202411171306
발명자
HUANG YUNLONG; HUI TAO; LIU ZHIWEN; CHEN XI
출원일
Aug 26, 2024
공개일
Sep 24, 2024
특허 패밀리 ID
92774784
IPC 분류
CPC 분류
The invention relates to a coating thickness detection method and device, a computer readable storage medium and a system. The method comprises the following steps: acquiring first distance information between a time-domain spectrum probe and an alignment point on a pole piece coating and coating thickness information at the alignment point acquired by the time-domain spectrum probe; acquiring a plurality of pieces of phase difference information acquired by the frequency domain spectrum probe array; and performing thickness detection according to the first distance information, the coating thickness information at the alignment point and the plurality of pieces of phase difference information to obtain coating thickness information at a plurality of non-alignment points. According to the invention, the accuracy of coating thickness measurement can be improved.
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