Photocathode, electron source module and electronic equipment
데이터 출처: EPO OPS
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개요
출원 번호
CN202310335695
발명자
ZHANG ZE; HE YIZUN; XIAO XIANG; HE ZHENGYU
출원일
Mar 24, 2023
공개일
Sep 24, 2024
특허 패밀리 ID
92765284
IPC 분류
CPC 분류
The embodiment of the invention provides a photocathode, an electron source module and electronic equipment, relates to the technical field of electron beam emission, and is used for solving the problem that exciting light is absorbed or reflected when a photocathode electron source generates a high-resolution electron beam. The photocathode comprises a substrate, an emission layer and a first focusing layer. The first focusing layer and the substrate layer are stacked on the same side of the emission layer. Excitation light provided by the light source passes through the first focusing layer before passing through the substrate and reaching the emission layer. The first focusing layer comprises a plurality of first focusing microstructures, and the first focusing microstructures can focus exciting light from the light source and then transmit the exciting light to the emission layer so as to provide electron beams.
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