Chip, chip stacking structure, chip packaging structure and electronic equipment
데이터 출처: EPO OPS
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개요
출원 번호
CN202310332340
발명자
ZHAO YANCHONG; BAI XIAOYANG; DONG JINWEN
출원일
Mar 23, 2023
공개일
Sep 24, 2024
특허 패밀리 ID
92777848
IPC 분류
CPC 분류
[0001] This application provides a chip, a chip stack structure, a chip packaging structure, and an electronic device, relating to the field of semiconductor technology. The chip is bonded to other chips and achieves signal communication through a dielectric layer and multiple bonding devices penetrating the dielectric layer. The parasitic capacitance between adjacent bonding devices in the chip is relatively small, thereby improving the signal transmission performance of the chip. The chip includes: a wafer; a first dielectric layer disposed on one side of the wafer; and multiple bonding devices penetrating the first dielectric layer, including adjacent first and second bonding devices; a channel is formed between the first and second bonding devices in the first dielectric layer, and the dielectric constant within the channel is lower than the dielectric constant of the material of the first dielectric layer.
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