CNIPA.AI
검색으로 돌아가기
기록

Adapter plate and preparation method thereof, chip packaging structure and electronic equipment

기타 / 미제공알 수 없음

데이터 출처: EPO OPS

현재 전문을 불러올 수 없습니다. 조회된 기본 정보는 계속 확인할 수 있습니다.

92816642패밀리
§ Ⅰ

개요

출원인

HUAWEI TECH CO LTD

출원 번호

CN202310355374

발명자

CHENG ZHIQIANG; REN YIWEI; ZHAO NAN; ZHANG TONGLONG; GUAN YONG; LI HENG

출원일

Mar 27, 2023

공개일

Sep 27, 2024

특허 패밀리 ID

92816642

IPC 분류

H01L23/31H01L23/48H01L25/07H10W74/01

CPC 분류

H10W20/01H10W20/023H10W20/0698H10W20/20H10W72/00H10W74/01H10W74/019H10W74/10H10W74/114H10W90/00

The embodiment of the invention provides an adapter plate and a preparation method thereof, a chip packaging structure and electronic equipment, relates to the technical field of semiconductors, and is used for reducing parasitic capacitance of metal wiring in the adapter plate. The adapter plate comprises a substrate and at least one rewiring layer stacked on the substrate. The rewiring layer comprises at least one first dielectric layer, at least one second dielectric layer, a metal wire and a first via hole, wherein the first dielectric layer and the second dielectric layer are alternately arranged, and the metal wire and the first via hole are electrically connected. Wherein the metal wiring is located in the first dielectric layer, and the first via hole is located in the second dielectric layer. And at least one gap is formed in the at least one second dielectric layer.

EPO 조사 자료

항목을 선택하면 해당 공개문헌의 공식 자료를 조회합니다.

위 항목을 선택하여 자료를 확인하세요.

특허 조사 도구