MICROMECHANICAL COMB STRUCTURE MADE OF GLASS, AND ASSOCIATED METHOD OF USE

원문 (중국어)

In order to extend the possible applications of the already known LIDE (laser-induced deep etching) method, this invention provides for producing a micromechanical comb structure () by placing a plurality of laser pulses () on a glass substrate () with a subsequent wet-chemical etching step for exposing the comb structure (), and to precisely control the position of those laser pulses () that define the outer contour () of respective fingers () of the comb structure (). This makes it possible to form very narrow fingers () that have uniform sidewalls (), whereby very small gap dimensions () and uniform electrostatic actuation of the comb structure () are rendered possible. By controlling the phase angle φ and/or the extent of the sidewall scalloping of the fingers (), it is also possible to favorably influence or set, in a targeted manner, the mechanical properties of the comb structure ().