HEAT EXCHANGER FOR UVO CLEANING SYSTEM
卷宗概要
申请人
KLA CORPORATION
发明人
Mitchell FAUST; Tara CHAN; HongBo SI; Jason LERCH; Francis CHILESE
IPC 分类
CPC 分类
A heat exchanger for a cleaning system includes a housing, and a manifold coupled to and at least partially extending into the housing. The manifold includes a manifold body extending between a first manifold end and a second manifold end, and a manifold channel formed within the manifold body. The heat exchanger further includes a light source operatively coupled to the second manifold end of the manifold, a fluid inlet fluidly coupled to the manifold channel, and a fluid outlet fluidly coupled to the manifold channel. The fluid inlet is positioned to direct a fluid onto the second manifold end of the manifold to cool the light source.
原文(中文)
A heat exchanger for a cleaning system includes a housing, and a manifold coupled to and at least partially extending into the housing. The manifold includes a manifold body extending between a first manifold end and a second manifold end, and a manifold channel formed within the manifold body. The heat exchanger further includes a light source operatively coupled to the second manifold end of the manifold, a fluid inlet fluidly coupled to the manifold channel, and a fluid outlet fluidly coupled to the manifold channel. The fluid inlet is positioned to direct a fluid onto the second manifold end of the manifold to cool the light source.