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HEAT EXCHANGER FOR UVO CLEANING SYSTEM

发明专利审中
20权利要求 · 3 独立
§ Ⅰ

卷宗概要

申请人

KLA CORPORATION

发明人

Mitchell FAUST; Tara CHAN; HongBo SI; Jason LERCH; Francis CHILESE

IPC 分类

F28F 9/F28F 9/2F28F 27/2

CPC 分类

F28F9/1F28F9/219F28F27/2

A heat exchanger for a cleaning system includes a housing, and a manifold coupled to and at least partially extending into the housing. The manifold includes a manifold body extending between a first manifold end and a second manifold end, and a manifold channel formed within the manifold body. The heat exchanger further includes a light source operatively coupled to the second manifold end of the manifold, a fluid inlet fluidly coupled to the manifold channel, and a fluid outlet fluidly coupled to the manifold channel. The fluid inlet is positioned to direct a fluid onto the second manifold end of the manifold to cool the light source.

原文(中文)

A heat exchanger for a cleaning system includes a housing, and a manifold coupled to and at least partially extending into the housing. The manifold includes a manifold body extending between a first manifold end and a second manifold end, and a manifold channel formed within the manifold body. The heat exchanger further includes a light source operatively coupled to the second manifold end of the manifold, a fluid inlet fluidly coupled to the manifold channel, and a fluid outlet fluidly coupled to the manifold channel. The fluid inlet is positioned to direct a fluid onto the second manifold end of the manifold to cool the light source.