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기록
Multibeam optical lever profiler
발명심사 중
5청구항 · 1 독립항
§ Ⅰ
개요
발명자
Wojciech Jan Walecki
IPC 분류
G1B 11/25
CPC 분류
G1B11/254
We present a novel optical lever surface slope metrology tool employing a plurality of optical beams converging and crossing at the point close to the measured surface. The system increases the range and accuracy of the measurement.
원문 (중국어)
We present a novel optical lever surface slope metrology tool employing a plurality of optical beams converging and crossing at the point close to the measured surface. The system increases the range and accuracy of the measurement.