MEASURING APPARATUS, MEASURING METHOD, AND MEASURING PROGRAM
개요
발명자
Kazuyuki MASUKAWA; Takuji OHASHI; Shutaro OTSUKA; Ai FURUBAYASHI; Toshiyuki SASAKI; Takaki HASHIMOTO
IPC 분류
CPC 분류
A measuring apparatus according to one embodiment includes a light source, a spectrometer, and a calculator. The light source emits measurement light. The spectrometer measures a spectroscopic spectrum waveform of light. The calculator is configured to: perform Fourier transform of the spectroscopic spectrum waveform; extract a waveform; calculate a phase angle at an amplitude peak position of the extracted waveform; calculate a temperature or thickness change amount based on the change amount of the phase angle; and calculate a temperature by adding the temperature change amount to a reference temperature, or calculate a thickness of the measurement target object by adding the thickness change amount to a reference thickness.
원문 (중국어)
A measuring apparatus according to one embodiment includes a light source, a spectrometer, and a calculator. The light source emits measurement light. The spectrometer measures a spectroscopic spectrum waveform of light. The calculator is configured to: perform Fourier transform of the spectroscopic spectrum waveform; extract a waveform; calculate a phase angle at an amplitude peak position of the extracted waveform; calculate a temperature or thickness change amount based on the change amount of the phase angle; and calculate a temperature by adding the temperature change amount to a reference temperature, or calculate a thickness of the measurement target object by adding the thickness change amount to a reference thickness.