NON-CONTACT MICROELECTROMECHANICAL SYSTEM DEVICE WITH HINGE-LEVEL ACTUATION
개요
발명자
Nathaniel GILLY; William C. MCDONALD; John HAMLIN
IPC 분류
CPC 분류
A microelectromechanical system device includes: a substrate; a first electrode on the substrate; a second electrode on the substrate, a first gap between the first electrode and the second electrode; a third electrode on the substrate; a fourth electrode on the substrate, a second gap between the third electrode and the fourth electrode; a first electrode pad on the substrate; a second electrode pad on the substrate; and a hinge extending between the first electrode pad and the second electrode pad. The hinge has a first extension and a second extension, the first extension over the first gap and the second extension over the second gap.
원문 (중국어)
A microelectromechanical system device includes: a substrate; a first electrode on the substrate; a second electrode on the substrate, a first gap between the first electrode and the second electrode; a third electrode on the substrate; a fourth electrode on the substrate, a second gap between the third electrode and the fourth electrode; a first electrode pad on the substrate; a second electrode pad on the substrate; and a hinge extending between the first electrode pad and the second electrode pad. The hinge has a first extension and a second extension, the first extension over the first gap and the second extension over the second gap.