High Throughput High Dynamic Range (HDR) Microscopy
案件概要
発明者
Matthew David Conrad; Jason William Leon Witry; Edward Robert Van Brunt
IPC分類
CPC分類
An example method includes obtaining a plurality of images of at least a portion of a semiconductor workpiece. Each of the plurality of images associated with exposing the at least a portion of the semiconductor workpiece to radiation at a different radiation intensity. The example method includes generating a composite workpiece image of at least a portion of the semiconductor workpiece based at least in part on the plurality of images.
原文（中国語）
An example method includes obtaining a plurality of images of at least a portion of a semiconductor workpiece. Each of the plurality of images associated with exposing the at least a portion of the semiconductor workpiece to radiation at a different radiation intensity. The example method includes generating a composite workpiece image of at least a portion of the semiconductor workpiece based at least in part on the plurality of images.
外部リソース