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案件記録

FRAMES FOR GLASS CORE HYBRID PANELS

発明審査中
20請求項 · 3 独立
§ Ⅰ

案件概要

発明者

Benjamin T. Duong; Pratyush Mishra; Robert A. May; Soham Agarwal; Kristof Darmawikarta; Gang Duan; Jeremy D. Ecton; Jung Kyu Han; Thomas S. Heaton; Kari E. Hernandez; Tarek A. Ibrahim; Andrew Matthew Jimenez; Brandon Christian Marin; Lilia May; Pratyasha Mohapatra; Son Van Nguyen; Srinivas Venkata Ramanuja Pietambaram; Bohan Shan; Hiroki Tanaka; David Vickery; Yekan Wang; Zhixin Xie

IPC分類

H1L 23/498H1L 21/48H1L 23/15

CPC分類

H1L23/49822H1L23/15H1L23/49827H1L21/481

Architectures and process flows for frames for glass core hybrid panels for semiconductor packaging. The glass core includes a layer of glass defined by a planar area enclosed by one or more edges that are substantially orthogonal to the planar area and at least one through-glass via (TGV) in the layer of glass, substantially filled with a conductive material. The frame comprises a coefficient of thermal expansion (CTE) that can be manipulated based on selection of frame material and/or percentage of copper in the frame material. The frame has a CTE of less than 11. The frame can enclose a panel, sub-panel or wafer and can include one or more cavities therein for respective glass cores.

原文(中国語)

Architectures and process flows for frames for glass core hybrid panels for semiconductor packaging. The glass core includes a layer of glass defined by a planar area enclosed by one or more edges that are substantially orthogonal to the planar area and at least one through-glass via (TGV) in the layer of glass, substantially filled with a conductive material. The frame comprises a coefficient of thermal expansion (CTE) that can be manipulated based on selection of frame material and/or percentage of copper in the frame material. The frame has a CTE of less than 11. The frame can enclose a panel, sub-panel or wafer and can include one or more cavities therein for respective glass cores.

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