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CAPPING LAYER FOR TRANSITION METAL DICHALCOGENIDE BASED TRANSISTOR STRUCTURES

发明专利审中
20权利要求 · 3 独立
§ Ⅰ

卷宗概要

发明人

Arnab Sen Gupta; Sarah Atanasov; Uygar E. Avci; Pratyush Buragohain; Jiun-Ruey Chen; Mahmut Sami Kavrik; Ande Kitamura; Chia-Ching Lin; Kirby Maxey; Matthew Metz; Carl H. Naylor; Kevin P. O’Brien

IPC 分类

H1L 29/76H1L 21/2H1L 29/6H1L 29/24H1L 29/423H1L 29/66H1L 29/775H1L 29/786

CPC 分类

H10D48/362H1L21/2568H1L21/2603H10D30/43H10D30/6735H10D30/6757H10D62/121H10D62/80H10D99/

Devices, transistor structures, systems, and techniques are described herein related to field effect transistors having one or more metal chalcogenide nanoribbons coupled to a source and a drain. Channel regions of the metal chalcogenide nanoribbons are coupled to a gate structure between the source and the drain. The metal chalcogenide nanoribbons are capped with a layer including an oxide of a metal or metalloid element, optionally doped with or including carbon.

原文(中文)

Devices, transistor structures, systems, and techniques are described herein related to field effect transistors having one or more metal chalcogenide nanoribbons coupled to a source and a drain. Channel regions of the metal chalcogenide nanoribbons are coupled to a gate structure between the source and the drain. The metal chalcogenide nanoribbons are capped with a layer including an oxide of a metal or metalloid element, optionally doped with or including carbon.