Piezoresistive chip and preparation method thereof, and piezoresistive sensor
데이터 출처: EPO OPS
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개요
출원인
BEIJING BOE SENSING TECH CO LTD; BOE TECHNOLOGY GROUP CO LTD; BEIJING BOE TECHNOLOGY DEV CO LTD
출원 번호
CN202410518379
발명자
WANG LIHUI; LI YUE; WEI QIUXU; GUO WEILONG; ZHANG TAONAN; CHANG WENBO; SUN JIE; HE NANA; LIU HANQING; DING DING
출원일
Apr 26, 2024
공개일
Aug 2, 2024
특허 패밀리 ID
92334479
IPC 분류
CPC 분류
The invention discloses a piezoresistive chip, a preparation method thereof and a piezoresistive sensor. The piezoresistive chip comprises a substrate provided with a pressure cavity and a Wheatstone bridge located on the substrate; the Wheatstone bridge comprises a plurality of piezoresistors, and the orthographic projections of the piezoresistors on the plane where the substrate is located are all located in the orthographic projection of the pressure cavity on the plane where the substrate is located; the plurality of piezoresistors at least comprise a first piezoresistor, a second piezoresistor, a third piezoresistor and a fourth piezoresistor which are connected with one another; the piezoresistive chip further comprises a shielding layer, the orthographic projection of the shielding layer on the plane where the substrate is located is at least partially overlapped with the orthographic projection of at least one piezoresistor on the plane where the substrate is located, the shielding layer is configured to be connected with a grounding end, and the long-term stability of the piezoresistive chip can be improved.
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