№ US20260002773A1发明专利
审中Multibeam optical lever profiler
Multibeam optical lever profiler
We present a novel optical lever surface slope metrology tool employing a plurality of optical beams converging and crossing at the point close to the measured surface. The system increases the range and accuracy of the measurement.
❖Wojciech Jan WaleckiWojciech Jan Walecki§ 1/5 权利要求G1B 11/2511