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Multibeam optical lever profiler
发明专利审中
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5权利要求 · 1 独立
§ Ⅰ
卷宗概要
发明人
Wojciech Jan Walecki
IPC 分类
G1B 11/25
CPC 分类
G1B11/254
We present a novel optical lever surface slope metrology tool employing a plurality of optical beams converging and crossing at the point close to the measured surface. The system increases the range and accuracy of the measurement.
原文（中文）
We present a novel optical lever surface slope metrology tool employing a plurality of optical beams converging and crossing at the point close to the measured surface. The system increases the range and accuracy of the measurement.