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广东创智精密设备有限公司

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№ CN122914032AInvention
Unknown

一种抛光系统及设备

本发明涉及硬质材料磨抛技术领域，公开了一种抛光系统及设备，抛光系统包括下磨盘和至少一个抛光头。抛光头下板内部开设循环水道，工件贴板采用导热材料制成并连接于抛光头下板底部；抛光区域产生的热量经由工件贴板快速传导至抛光头下板，再由循环水道内通入的冷却介质带走；同时，下磨盘底部设有散热结构，冷却喷淋结构向下磨盘底部喷淋冷却液，以带走下磨盘的热量；此外，抛光头在下磨盘上的投影位置与散热结构中延伸槽的分布区域相耦合，使得下磨盘的冷却区域覆盖抛光头对应的热源集中区。因此，抛光过程中产生的热量能够被及时、高效地导出，有效避免金刚石晶片局部热量积聚和高温烧蚀，保证金刚石晶片的抛光质量，提高加工良率。

❖广东创智精密设备有限公司黄敏光; 邹展; 刘留; 孙锡泉; 吴伟平Oct 16, 2026§ 2/10 ClaimsB24B 37/10 (2012.01), B24B 37/34 (2012.01), B24B 55/02 (2006.01) +1