光学模组及形成光学模组的方法
一种光学模组包括基材结构与超颖透镜。基材结构包括光波导。超颖透镜位于基材结构上方。超颖透镜包括介电结构与多个超颖原子。介电结构位于基材结构上方。所述多个超颖原子位于介电结构中且分别包括第一部位与位于第一部位上方的第二部位。第二部位在基材结构上的正投影区域至少部分地重叠于第一部位在基材结构上的正投影区域。可以形成具有高深宽比的超颖原子与超颖透镜结构,且能有效提升光学模组的耦合效率与封装可靠度。超颖透镜用以接收来自于光波导的光信号。
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