№ EP4675145A1発明
審査中ADAPTER APPARATUS AND SEMICONDUCTOR PROCESS DEVICE
ADAPTER APPARATUS AND SEMICONDUCTOR PROCESS DEVICE
❖Beijing NAURA Microelectronics Equipment Co., Ltd.LIU, Dongxu; MA, Hongshuai; NAN, Jianhui; ZHAO, HongyuJan 6, 2026F16L, H01L23