一种大尺寸超低氧单晶硅的制备方法
一种大尺寸超低氧单晶硅的制备方法,涉及超低氧单晶硅拉制技术领域,包括化料工序,化料完成后,打开CUSP勾型磁场,控制晶转方向和埚转方向相同,拉制超低氧单晶硅,在化料完成后、拉制超低氧单晶前,关闭CUSP勾型磁场,控制晶转的方向和埚转的方向相反,拉制至少一根过渡晶棒,本发明能够降低单晶硅内的氧含量,得到超低氧单晶硅。
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