№ CN122936019AInvention
Unknown掩模用组合物以及刻蚀加工用掩模
提供一种关于能够形成膜更厚的掩模的掩模用组合物的技术。本发明的一个方式为掩模用组合物。该掩模用组合物具有金属氢氧化物和溶剂。所述金属氢氧化物分散或溶解于所述溶剂。
❖巴川集团股份有限公司加藤昌央; 白鸟仁朗Oct 16, 2026§ 2/9 ClaimsH10P 50/00 (2026.01)31
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巴川集团股份有限公司
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