污染物质去除装置及使用其的污染物质去除方法
一种污染物质去除装置,其对污染面照射由脉冲振荡器振荡出的纳米脉冲激光来去除表面污染物质,包括:利用平顶光束整形器将由脉冲振荡器振荡出的高斯形状光束的纳米脉冲激光40转换成方型平顶形状的纳米脉冲激光44的手段、以及对污染面照射方型平顶形状的纳米脉冲激光44的手段,将前述表面污染物质以0.15μm以上的固体状态去除。由此,提供不对基材造成损伤且不使污染物质挥发地进行去除的污染物质去除装置以及使用其的污染物质去除方法。
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