用于打印头的IPC涂层
一种喷墨打印机打印头、其元件或其他组件具有内腔,所述内腔具有保护涂层。组件的其他表面可以具有所述保护涂层。为了制备所述保护涂层,选择用于HfO(二氧化铪)膜的目标厚度,以避免形成针孔、薄斑和结节生长。使用针对所述目标厚度进行工艺调整的原子层沉积(ALD),将HfO膜作为保形层沉积在组件上,包括沉积在所述内腔的表面上,以形成涂覆组件。可以在HfO膜上包括不润湿涂层。
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