一种SiC开口环的加工方法和装置
本发明涉及无机非金属材料加工技术领域,具体涉及一种SiC开口环的加工方法和装置,所述加工方法包括石墨切型、高温纯化、石墨坯体的第一面加工、石墨坯体的第二面加工、高温矫正、冷却以及沉积。本发明的SiC开口环的加工方法,在高温矫正步骤中,将处于断开状的石墨坯体放入矫正装置内,在特定温度环境下烘烤3‑5H,能够基本消除产品应力,减少形变风险,大大提高了产品的尺寸稳定性,避免了因形变导致的产品报废,从而提高了SiC开口环产品的合格率。
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