波导及其出射耦合光栅的制备方法与车用扩增实境抬头显示器
本申请涉及光学显示技术领域,特别是涉及一种波导及其出射耦合光栅的制备方法,适于制备大面积的波导,并可应用于车用扩增实境抬头显示器。所述制备方法于基板上的定义出预设出射耦合光栅以进行分区作业,各分区的范围之间均以预设出射耦合光栅的中心向两端偏离,其中至少一个分区的边缘区域经干涉光刻形成的光栅的线宽比应于预设阈值内。接着,第一区以既定蚀刻深度集合进行蚀刻,第二区则优先以第一区的蚀刻深度集合进行蚀刻,以达到减少分区间重复蚀刻的目的。
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