ELECTRODEPOSITION SYSTEMS
개요
발명자
Zhian HE; Navaneetha Krishnan SUBBAIYAN; Swapnil Dattatray DESHMUKH; Cian SWEENEY; Benjamin SMEDLEY; Jonathan REID; Shantinath GHONGADI
IPC 분류
CPC 분류
Examples are disclosed that relate to operating an electrodeposition system comprising an inert anode. In one example system, the electrodeposition system includes a substrate holder and a cathode chamber configured to hold a catholyte. An anode chamber configured to hold an anolyte during the electrodeposition process comprises an inert anode. An intermediate chamber is positioned between the cathode chamber and the anode chamber. The intermediate chamber is separated from the cathode chamber by an ion exchange membrane.
원문 (중국어)
Examples are disclosed that relate to operating an electrodeposition system comprising an inert anode. In one example system, the electrodeposition system includes a substrate holder and a cathode chamber configured to hold a catholyte. An anode chamber configured to hold an anolyte during the electrodeposition process comprises an inert anode. An intermediate chamber is positioned between the cathode chamber and the anode chamber. The intermediate chamber is separated from the cathode chamber by an ion exchange membrane.