MOBILE SENSOR DEVICES FOR SEMICONDUCTOR FABRICATION EQUIPMENT
개요
발명자
Travis R. Taylor; Todd A. Lopes; Pratik Vijay Yadav; Christopher William Burkhart
IPC 분류
CPC 분류
Systems and techniques for obtaining various types of sensor information regarding operational aspects of a semiconductor processing tool are disclosed. Such systems and techniques may involve an instrumented wafer that includes one or more different types of sensors, including, for example, pressure sensors, oxygen (or other gas) sensors, humidity sensors, upward- and/or outward-facing imaging sensors or optical sensors, microphone sensors, and so forth.
원문 (중국어)
Systems and techniques for obtaining various types of sensor information regarding operational aspects of a semiconductor processing tool are disclosed. Such systems and techniques may involve an instrumented wafer that includes one or more different types of sensors, including, for example, pressure sensors, oxygen (or other gas) sensors, humidity sensors, upward- and/or outward-facing imaging sensors or optical sensors, microphone sensors, and so forth.