DIRECT VOLTAGE CONTROL OF A CLAMPING SURFACE OF AN ELECTROSTATIC CLAMP

원문 (중국어)

A system and method for clamping a workpiece positions a workpiece on a clamping surface of an electrostatic clamp (ESC). The clamping surface is electrically grounded or electrically floated based on conditions of the workpiece and the ESC, such as a resistivity of the workpiece, where the clamping surface is electrically floated when the resistivity of the workpiece is high. A clamping voltage is applied to the ESC to clamp the workpiece to the clamping surface for semiconductor processing. The clamping surface is electrically coupled to an electrical ground for releasing the workpiece from the clamping surface. A release status of the workpiece is determined, to be in a clamped or released state. When the release status is clamped, a bias potential is applied to the clamping surface by a switch to promote de-clamping. When the release status is released, the workpiece is removed from the clamping surface.