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一种硒化铋纳米级裂缝的可控合成方法及所得硒化铋纳米片的应用
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8Claims · 3 independent
§ Ⅰ
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Inventor
吴金雄; 陈婉莹; 何育彧
IPC Classification
C01B 19/04 (2006.01)C30B 25/00 (2006.01)C30B 29/46 (2006.01)C30B 29/64 (2006.01)C30B 29/68 (2006.01)B82Y 40/00 (2011.01)B82Y 30/00 (2011.01)H10D 30/00 (2025.01)
本发明公开了一种硒化铋纳米级裂缝的可控合成方法及所得硒化铋纳米的应用。以BiSe粉末为原料,通过化学气相沉积(CVD)法,在生长过程中通入微量氢气(H)诱导裂缝形成。化学气相沉积步骤中,体系压强为100‑600 Torr;沉积温度为380‑600℃;沉积时间为5‑40分钟;载气的流量为100~400 s.c.c.m.;氢气的流量为0.3~3s.c.c.m.。该方法操作简便,可精准调控裂缝密度与分布,所得裂缝大小在10~100 nm之间可控,样品载流子浓度高,导电性显著增强,纳米级的裂缝宽度可作为晶体管的天然沟道,适用于高性能短沟道晶体管器件的接触工程。
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