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一种蓝宝石抛光液及其制备方法和应用
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10Claims · 4 independent
§ Ⅰ
Dossier Overview
Applicant
衢州博来纳润电子材料有限公司
Inventor
郭家兴; 安俊雪
IPC Classification
C09G 1/02 (2006.01)B24B 57/00 (2006.01)C09G 1/18 (2006.01)
本发明涉及研磨和抛光技术领域,特别是涉及一种蓝宝石抛光液及其制备方法和应用。所述蓝宝石抛光液包括如下重量份的组分:20~30wt%氧化铝粉料,0.1~1wt%分散剂,0.01~1wt%悬浮助剂,1~10wt%pH调节剂,0.1~3wt%润滑剂,余量为水;所述悬浮助剂选自非离子纤维素醚和兼具刚性双螺旋、低电荷、无乙酰的结构特性的多糖中的一种或多种。本申请中所述蓝宝石抛光液研磨颗粒在强碱和高离子强度下悬浮性能优异、分散稳定性高;能够实现在强碱和高离子强度条件下,抛光液对蓝宝石晶片较高的抛光去除效率和优异的表面质量(粗糙度Ra低)。
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