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一种铝合金制品及其制备方法与磁控溅射设备
InventionActive
10Claims · 3 independent
§ Ⅰ
Dossier Overview
Inventor
陈星宇
IPC Classification
C23C 28/00 (2006.01)C23C 14/16 (2006.01)C23C 14/35 (2006.01)C30B 25/22 (2006.01)C30B 29/38 (2006.01)C23C 16/26 (2006.01)C23C 16/52 (2006.01)C23C 16/02 (2006.01)C23C 14/06 (2006.01)C23C 14/00 (2006.01)C30B 25/18 (2006.01)C30B 29/36 (2006.01)C30B 25/06 (2006.01)
本发明公开了一种铝合金制品及其制备方法与磁控溅射设备，该铝合金制品包括：通入氮气，调整气压为第一气压值，同时开启Zr靶，沉积ZrN层；关闭氮气，通入CH气体，调整气压为第二气压值，同时开启Zr靶，沉积ZrC层；重复上述步骤，依次交叠沉积ZrN层和ZrC层，形成交叠结构层。该铝合金制品制备方法，包括步骤：通入氮气，调整气压为第一气压值，同时开启Zr靶，沉积ZrN层；关闭氮气，通入CH气体，调整气压为第二气压值，同时开启Zr靶，沉积ZrC层；重复上述步骤，依次交叠沉积ZrN层和ZrC层，形成交叠结构层。该磁控溅射设备，被配置为执行铝合金制品的制备方法。
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