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一种高光刻留膜率的正性光敏聚酰亚胺树脂胶液及其制备方法和应用

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10Claims · 3 independent
§ Ⅰ

Dossier Overview

Inventor

曾彩萍; 杨进平; 张俊武; 杨士勇

Filing Date

Jul 20, 2026

Publication Date

Oct 20, 2026

IPC Classification

G03F 7/004 (2006.01)G03F 7/039 (2006.01)H10W 70/695 (2026.01)H10W 20/48 (2026.01)

本发明公开了一种高光刻留膜率的正性光敏聚酰亚胺树脂胶液及其制备方法和应用,涉及高分子材料技术领域,包括含酚羟基聚酰胺酸酯共聚树脂、光致产酸剂、热交联剂、热致产酸剂、增感剂、有机溶剂、助粘剂;所述树脂胶液经涂覆、前烘、紫外曝光、碱性水溶液显影、180~230℃加热固化后形成三维立体光刻图形;本发明制备的正性光敏聚酰亚胺树脂胶液,光刻留膜率稳定达到91%~93%,突破现有商用产品≤85%的技术瓶颈,光刻图形完整度、膜厚均匀性显著提升,满足先进封装高精度布线要求;其界面粘结性能优良,与铜导电层、硅/玻璃基板粘结力强,百格测试无剥离现象,杜绝膜层分层、脱落问题。

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