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用于半导体湿法清洗的电子级异丙醇纯化工艺

InventionUnknown
10Claims · 1 independent
§ Ⅰ

Dossier Overview

Inventor

葛宏桂; 牟卫兵; 王直凯; 孙建东

Filing Date

Sep 22, 2026

Publication Date

Oct 27, 2026

IPC Classification

C07C 29/74 (2006.01)C07C 29/76 (2006.01)C07C 29/88 (2006.01)C07C 29/80 (2006.01)C07C 31/10 (2006.01)B01D 3/14 (2006.01)B01D 71/36 (2006.01)B01D 67/00 (2006.01)

本发明公开一种用于半导体湿法清洗的电子级异丙醇纯化工艺,属于异丙醇纯化领域,具体包括以下步骤:对原料异丙醇进行预精馏处理,取中间馏分,得到预处理异丙醇,向预处理异丙醇中引入超纯水和电子级二氧化碳,得到活化异丙醇。本发明是通过构建具有单侧阳离子亲和层和孔内传导网络的非对称阳离子传导膜,并配合微量水和二氧化碳活化异丙醇,使金属杂质在电场作用下定向迁移至超纯水侧,从而实现对异丙醇中痕量金属杂质的高效去除,降低电子级异丙醇中金属含量,提高电子级异丙醇的纯化效率。

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