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一种前驱体溶液及制备方法、基于PECVD技术的环保型防水纳米膜及制备方法
InventionUnknown
10Claims · 4 independent
§ Ⅰ
Dossier Overview
Inventor
孙鹏; 吴锦辉
Filing Date
Aug 5, 2026
Publication Date
Oct 27, 2026
IPC Classification
C08F 136/20 (2006.01)C23C 16/44 (2006.01)C23C 16/513 (2006.01)
本申请涉及精密器件防水防护领域，主要涉及一种前驱体溶液及制备方法、基于PECVD技术的环保型防水纳米膜及制备方法。一种基于PECVD技术的环保型防水纳米膜的制备方法，包括以下步骤：将基材置于反应腔室内，往反应腔室内通入汽化后的前驱体溶液和工艺气体，开启等离子体放电，进行化学气相沉积反应，形成基于PECVD技术的环保型防水纳米膜。本申请提供了一种结构等效派瑞林、绿色无卤、低温高效、性能更优、可规模化量产的新型纳米防水膜层及制备工艺。
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