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植球装置
InventionUnknown
9Claims · 1 independent
§ Ⅰ
Dossier Overview
Inventor
刘泽洋; 董达阳; 邵先情
Filing Date
Aug 21, 2026
Publication Date
Oct 27, 2026
IPC Classification
H10W 72/00 (2026.01)
本申请涉及晶圆植球领域，提供一种植球装置，包括网板和植球组件；网板用于盖设于晶圆上；网板上设有网孔，网孔与晶圆的植球位的位置一一对应；植球组件包括植球单元和回收单元；植球单元包括植球管道，植球管道用于供锡球在其内部流通并使锡球朝向网板下落；回收单元用于回收未落在网孔内的锡球；回收单元具有排料端，排料端与植球管道连通。本申请解决了植球的成本较高的问题。
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