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MEASUREMENT METHOD FOR DETERMINING A REPLICATION PARAMETER, AND REPLICATION METHOD USING THE DETERMINED REPLICATION PARAMETER
InventionPending
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§ Ⅰ
Dossier Overview
Applicant
Carl Zeiss Jena GmbH
Inventor
GIEHL, Markus; BLECHSCHMIDT, Christian
Filing Date
Feb 26, 2024
Publication Date
Jan 6, 2026
IPC Classification
G01MG03HG03HG03HG03H
CPC Classification
G03HG03H2223/14G03H2226/11G03H2001/2244G03H2001/2247G03HG03HG03H2001/266G03H2222/36G03H2222/46G03H2222/34G03H2222/52G03HG03H2001/205G03H2001/0491G03H2227/03G03H2001/0415G03H2240/53
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