Dossier

ONIUM SALT MONOMER, POLYMER, CHEMICALLY AMPLIFIED NEGATIVE RESIST COMPOSITION, AND RESIST PATTERN FORMING PROCESS

InventionPending

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Dossier Overview

Applicant

Shin-Etsu Chemical Co., Ltd.

Inventor

FUKUSHIMA, Masahiro

Filing Date

Jun 29, 2025

Publication Date

Jan 6, 2026

IPC Classification

G03FG03FC07CC07CC07CC07CC07DC07DC08FC08FC08FC08FC09D

CPC Classification

G03FG03FC07CC07DC07DC07CC07CC07CC08FC08FC08FC09DC08F

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